Kashiyama Dry Vacuum Pumps

 

Air Cooled Dry Pump NeoDry Series

Air-Cooled, Reduced Foot Print, Dry Vacuum pump, The Lowest Cost of Ownership (CoO), Compettitively Priced

 

altBrochure - Kashiyama Air Cooled Dry Pump NeoDry Series

 


 

 

Micro Dry Pump MU Series

The world smallest and least power consumption. The pump can be integrated into any equipment easily.

 

altBrochure - Kashiyama Micro Dry Pump MU Series

 

 

 

 


 

 

Dry Screw Pump SDE Series

Dry pumps reliable for all applications. Energy-saving feature combined with the reiability, SDE Series achieved lower running cost.

 

altBrochure - Kashiyama Dry Screw Pump SDE Series

 

 

 

 


 

 

High Throughput Dry Pump SDL Series

Higher pumping speed. Support larger diameter wafer, larger Flat Panel Display (FPD) substrate and Solar applications. Higher pumping speed minimises the tact time for large load lock chamber.

 

altBrochure - Kashiyama High Throughput Dry Pump SDL Series

 

 

 

 


 

 

Booster Pump KMB Series

Can be used in combination with the dry pumps to enhance pumping capacity. Rotational speed control enables operation from atmospheric pressure.

 

altBrochure - Kashiyama Booster Pump KMB Series

 


 

 

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