Quartz Crystal Sensors and Feedthroughs

 

Front Load Single Sensor

INFICON Front Load Single Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor/feedthrough combination that can be either welded or assembled with compression fittings.

 

alt Datasheet-Front Load Single Sensor

 


 

 

Front Load Dual Sensor

INFICON Front Load Dual crystal sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The dual sensor provides a backup crystal and is essential for critical processes where it is desirable to have the second crystal in the vacuum chamber.

The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor/feedthrough combination that can be either welded or assembled with compression fittings.

 

alt Datasheet-Front Load Dual Sensor

 


 

 

Front Load Bakeable Sensor

INFICON Front Load Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450 o  C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion.

 

alt Datasheet-Front Load Bakeable Sensor


 

 

 

Cool Drawer Single Sensor Head

The Cool Drawer Single Sensors allow crystal installation into the sensor from the side, convenient for systems with insufficient room for front load crystal installation. The Cool Drawer Single Sensor employs the Cool Drawer Crystal Holder which is thermally shielded by the water-cooled housing insuring excellent crystal performance.

 

alt Datasheet-Cool Drawer Single Sensor

 


 

 

Cool Drawer Dual Sensor Head

The Cool Drawer Dual Sensor is designed for use in critical processes where it is desirable to have a second crystal in the vacuum chamber. Water cooled, cast stainless steel sensor body, two Cool Drawer crystal holders and a pneumatically actuated shutter provide for a rugged sensor head with the extra reliability of a backup crystal. A cleaner, more reliable vacuum system installation is possible as there are no coaxial cables inside the chamber.

 

alt Datasheet-Cool Drawer Dual Sensor

 


 

 

RSH-600 Rotary Sensor Head

Excellent Crystal Performance in Demanding Applications

RSH-600 Rotary Sensor Heads are designed for demanding processes, employing very thick films and several different materials. The RSH-600 holds six crystals in a thermally shielded, water-cooled housing, ensuring excellent crystal performance in temperature environments up to 300°C. Crystals are housed in an easy to remove Teflon® and stainless steel crystal holder.

 

alt Brochure-Maxtek RSH-600 Rotary Sensor Head

 

alt Datasheet-RSH-600 Rotary Sensor Head

 


 

 

Sputtering Sensor

The INFICON Sputtering Sensor is specifically designed for use in any sputtering process. The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system.

 

alt Datasheet-Sputtering Sensor

 


 

 

Crystal Six Sensor

The INFICON CrystalSix Sensor is critical for long processes demanding continuous rate control. Whether an OLED, MBE, solar, long optical coating, or other processes having an extended period between chamber venting, the CrystalSix sensor offers the security of 6 quartz monitor crystals in one sensor head. When used with an INFICON Thin Film Controller, the CrystalSix automatically rotates a new crystal into position whenever the current crystal fails or becomes unstable. Crystals are automatically replaced without interrupting your process for continued deposition rate monitoring.

Crystal indexing is accomplished with a pneumatically driven mechanism. This pneumatically driven motor provides better crystal thermal stability than competitive units using expensive in-vacuum, heat generating, electric motors. One-eighth inch water cooling tubes keep the sensor head thermally stable and allow flexibility in sensor placement.

When used with certain INFICON thin film controllers, the sensor provides position feedback so specific positions can be used with specific materials.

 

alt Datasheet-CrystalSix Sensor

 


 

 

 Crystal 12 Sensor

The INFICON Crystal 12 Sensor replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller. Whenever a crystal becomes unstable or fails, IC6 signals the Crystal 12 sensor carousel to immediately rotate a new crystal into position, for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.

 

alt Brochure-Crystal 12 Sensor

 

alt Datasheet-Crystal 12 Sensor

 


 

 

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