Plasma Process Monitors

PPM422 PLASMA PROCESS MONITOR

The PPM422 Plasma Process Monitor is a differentially pumped mass spectrometer with an integrated energy analyser for measuring neutral particles, positive and negative ions, as well as for energy analysis of ions and neutral particles in plasma processes.

Features at a Glance

      • Detection of neutral particles and positive and negative ions from the plasma
      • Energy analysis of neutral particles and positive and negative ions
      • Measurement of radicals
      • Endpoint detection of plasma process
      • Large dynamic range
      • High measuring speed

 


 

Check out more INFICON Residual Gas Analysers (RGA), click here.