89200 Series Transfer Door Valves

 

 Description

  • OEM Integration. All our products are engineered to be compatible with the latest Semiconductor tools and offer a retrofit solution for upgrading previous generation tools. Whether it is an etch, CVD, PVD cluster tool or implanter, HVA offers easy OEM Integration for all your MESC applications. Our valves come equipped with standard interfaces for 150, 200, 300 and 450mm technologies.      
  • Flexible Design. If you need more flexibility, we can design specific sizes and interfaces for your transfer or load lock application.      
  • Process Compatible. Every valve leaves our factory with the highest quality MIL SPEC type II Anodize finish for aluminum or Electropolish for stainless steel. The inherent design of the HVA valve accomodates operation in high process temperatures up to 150C. Higher temperature options available.
  • Vacuum Performance. Gates are precision machined from High Grade 6061 T6 aluminum or 304 stainless steel. When you use an HVA valve you know you are getting the best vacuum performance possible.      
  • System Reliability. HVA valves are equipped with hardened stainless steel shafts and our moly wiper protection system to ensure the valves continue to operate during multiple substrate breakages and extends the service interval to >2,000,000 cycles.
  • Easy Service / Cost Effective. We design our products to be maintenance friendly. Standard service items can be exchanged by end user during a regular minor service reducing downtime and service costs.
  • Lifetime Warranty. You can be confident you have made the smart choice. We back up our craftsmanship on every valve that leaves the factory with our limited lifetime warranty

 

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alt Datasheet - 89200 Series

 

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