21200 Series Million Cycle Gate Valves



The 21200 Series Million Cycle Gate Valves are designed for high vacuum applications specifically when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation.  All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, high cycle, low outgassing valves.





alt Catalog - 21200 Series

alt 21200 Series Model Key Guide

(Help! finding a model NO.)


To obtain 2D drawings (PDF), 3D drawings (STP), and to request a quote, contact us.



Check out more HVA High Vacuum Valves, click here.